2009 Materials for Advanced
Metallization Conference
Zusammenfassung:
This workshop is the 18th in a series
devoted to materials research, materials properties and interactions.
Starting with refractory metals and silicides in the 80's, moving to
materials for advanced metallization in 1995, this year's workshop addresses
new and challenging topics in the field of BEOL solutions, novelties in
alternative interconnect systems and more widely advanced materials and
structures relevant to micro and nano-electronics.
The objective of the workshop is to provide a forum for open discussions
between science and industrial application. It is dedicated to material
scientists, process and integration engineers and Ph-D students.
Topics include both fundamental and applied research, as well as issues
related to introduction into manufacturing. With the progressive downscaling
of device dimensions and the simultaneous demand for more functionality, the
challenges have become tremendous. New and extensive materials research is
needed to further follow IC scaling as well as to develop new devices at the
nanoscale.
Invited talks will be given by scientific and technical leaders in each of
the key areas to present the current state-of-the-art and to stimulate
technical discussions.
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